Development of novel dual-axis sensing gyroscope using surface acoustic wave

0167-9317/$ see front matter 2012 Elsevier B.V. A http://dx.doi.org/10.1016/j.mee.2012.02.022 ⇑ Corresponding author. Tel.: +82 31 219 2488; fax E-mail address: [email protected] (K. Lee). This study proposes a new dual-axis sensing gyroscope based on SAW (surface acoustic wave), in which two substrates are bonded together and completely sealed. The gyroscope on the bottom substrate is used for y-axis Coriolis force detection while the upper one is used for x-axis angular velocity. The bottom gyroscope was mounted onto the silicon substrate and four sides were completely sealed by JSR photoresist (PR) to protect the sensor surface from undesirable factors like temperature and humidity. The obtained sensitivity and linearity of the SAW gyroscope for y-axis Coriolis force were 45.32 and 0.907 Hz/(deg/s), respectively. And the sensitivity and linearity for x-axis were 27.34 and 0.837 Hz/ (deg/s), respectively. Simultaneous detections of two Coriolis forces in the orthogonal direction were successfully demonstrated, and high shock survival and thermal stability were also observed from the developed devices, denoting that this sensor system is very useful for detecting multi-axis Coriolis forces at a time as well as protecting the sensor surface. 2012 Elsevier B.V. All rights reserved.